If you haven't seen it yet, University of Maryland College Park has a Masters of Engineering (M.Eng) in Cybersecurity:
PMCY Masters or Graduate Certificate, OAEE, University of Maryland - it's only available in person (no online option... yet, which is ironic, because a M.Eng in Nuclear Engineering is available online...) It looks like a good program. I might add it to my shortlist of Master's programs...